Electron beam array write head system and method
US6891169B2 · kind B2 · utility
1Cited by
2References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 21, 2003 |
| Grant date | May 10, 2005 |
| Priority date | — |
| Expiry date | Jul 31, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/30433
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
An e-beam system generates a set of massively parallel beams of order of magnitude 1,000 by employing a flash eprom to store calibration data and to receive on/off signals directed through the address system of the memory array, the individual electron sources being mounted above the memory array in a geometric array that tracks the structure of the memory array.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.