Optical pressure sensor
US6894787B2 · kind B2 · utility
17Cited by
10References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2001 |
| Grant date | May 17, 2005 |
| Priority date | — |
| Expiry date | Jan 13, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor is formed on a substrate, the surface of the substrate having a p-n junction and a shell with a beam inside the shell over the p-n junction. The beam and the shell and the p-n junction surface form optical Fabry-Pérot cavities. An optical fiber is positioned in a hole formed in the underside of the substrate below the p-n junction. Light from the fiber charges the p-n junction and drives it into vibration mode. Pressure changes change the tension in the diaphram to vary the frequency with changes in pressure, so that pressure can be detected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.