Inventor · Plymouth, MN, US

Son T. Lu

14Patents
6h-index
8Co-inventors
59Inventor score

Filing activity: Dec 21, 2001 → Aug 26, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US6894787B2 Optical pressure sensor Physics 17 Expired
US8242851B2 Processes for stabilizing a VCSEL in a chip-scale atomic clock Emerging Cross-Sectional Technologies 13 Active
US8299860B2 Fabrication techniques to enhance pressure uniformity in anodically bonded vapor cells Emerging Cross-Sectional Technologies 10 Active
US8067991B2 Chip-scale atomic clock with two thermal zones Electricity 6 Active
US8218590B2 Designs and processes for thermally stabilizing a vertical cavity surface emitting laser (vcsel) in a chip-scale atomic clock Electricity 6 Active
US7368085B2 Analyte detector Emerging Cross-Sectional Technologies 6 Expired
US7549206B2 Shell flow sensor Emerging Cross-Sectional Technologies 5 Active
US8941442B2 Fabrication techniques to enhance pressure uniformity in anodically bonded vapor cells Emerging Cross-Sectional Technologies 4 Active
US9146540B2 Fabrication techniques to enhance pressure uniformity in anodically bonded vapor cells Emerging Cross-Sectional Technologies 3 Active
US10867855B2 Through silicon via fabrication Electricity 2 Active
US7000477B2 Optical pressure sensor Physics 2 Expired
US7494598B2 Miniature optically transparent window Performing Operations; Transporting 1 Active
US11430695B2 Through silicon via fabrication Electricity 1 Active
US11776849B2 Through silicon via fabrication Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.