Objective lens arrangement for use in a charged particle beam column
US6897442B2 · kind B2 · utility
10Cited by
6References
21Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 25, 2003 |
| Grant date | May 24, 2005 |
| Priority date | — |
| Expiry date | Apr 25, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An objective lens arrangement is presented for mounting in a charged particle beam column adjacent to an anode tube that defines a beam drift space for a charged particle beam propagating towards a sample. The lens arrangement comprises a magnetic lens and an electrostatic lens, wherein the electrostatic lens includes upper and lower electrodes arranged in a spaced-apart coaxial relationship along an optical axis of the lens arrangement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.