System for damping oscillations

US6897599B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Franz Sorg · Aalen, DE
• Stefan Xalter · Oberkochen, DE
• Frank Melzer · Utzmemmingen, DE
• Bernhard Gellrich · Aalen, DE
• Michael Muehlbeyer · Aalen, DE

Key dates

• Filing date: Feb 12, 2002
• Grant date: May 24, 2005
• Expiry date: May 17, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/709
• WIPO field: Mechanical elements
• WIPO sector: Mechanical engineering

Abstract

In a system for overcoming or at least damping oscillations in or through channels (9) which carry fluid in a component, in particular coolant in cooling channels in an optical element (1), in particular a projection objective lens (1a) for semiconductor lithography, oscillations which occur are detected and evaluated by sensors (5), after which the result is passed, in the form of an adaptronic control loop to piezoelectric elements (9), which are integrated in the optical element, and are in the form of thin plates, films or layers which, when activated, produce the oscillations or frequencies which counteract oscillations and natural frequencies produced by the turbulence.