Optical spot grid array printer
US6897941B2 · kind B2 · utility
33Cited by
73References
44Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 7, 2002 |
| Grant date | May 24, 2005 |
| Priority date | — |
| Expiry date | Nov 30, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70391
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A high resolution and high data rate spot grid array printer system is provided, wherein an image is formed by scanning spot-grid array of optical beams across a substrate layered with a resist. High resolution is achieved by apodizing the optical beams to provide a narrower main lobe. Unwanted recordation of side lobes upon the substrate is prevented by assuring that the side lobes do not include energy above the threshold of the resist, using a memoryless resist, and by using a slanted and interleaved scan pattern adapted for use with the spot-grid array pattern and the memoryless characteristic of the resist.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.