Hardware configuration for parallel data processing without cross communication
US6898304B2 · kind B2 · utility
5Cited by
8References
13Claims
0Family size
Assignee
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Key dates
| Filing date | Dec 1, 2000 |
| Grant date | May 24, 2005 |
| Priority date | — |
| Expiry date | May 26, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for parallel processing of data without the need for cross-communication or synchronization between processing nodes is provided. The system is especially suitable for use in a wafer inspection system for the semiconductor industry. Embodiments include scanning a small area of the wafer, and distributing pixel data among a plurality of processing nodes, each of which accept and process an optimal amount of pixel data independently of the other processing nodes, thereby enabling increased throughput without increasing system complexity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.