Closed-drift hall effect plasma vacuum pump for process reactors
US6899527B2 · kind B2 · utility
5Cited by
7References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2003 |
| Grant date | May 31, 2005 |
| Priority date | — |
| Expiry date | Dec 23, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/54
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A closed-drift Hall effect plasma vacuum pump includes one or more pumping conduits which are linked with a radial magnetic field. The magnetic field separates a plasma from a plasma at a higher pressure which is formed by cross-field plasma transport from a plasma processing region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.