Capacitive manometer having reduced process drift
US6901808B1 · kind B1 · utility
23Cited by
18References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 11, 2003 |
| Grant date | Jun 7, 2005 |
| Priority date | — |
| Expiry date | Feb 20, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0636
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive manometer includes a flow passage through which gas can enter the manometer, a deflectable diaphragm, and a filter arranged in the flow passage. The filter is capable of removing condensable vapors from the gas so that the condensable vapors do not reach and deposit on the diaphragm. The capacitive manometer can include a cooling unit arranged to cool the filter so as to enhance removal of condensable vapors from the gas by the filter. The capacitive manometer can include a baffle having gas passages distributed to control distribution of condensable vapors, which pass through the baffle, on the diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.