Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same

US6903337B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Oliver Kienzle · Aalen, DE
• Dirk Stenkamp · Oberkochen, DE
• Michael Steigerwald · Aalen, DE
• Rainer Knippelmeyer · Utting am Ammersee, DE
• Max Haider · Gaiberg, DE
• Heiko Müller · Baumholder, DE
• Stephan Uhlemann · Heidelberg, DE

Key dates

• Filing date: Jul 1, 2002
• Grant date: Jun 7, 2005
• Expiry date: Jul 9, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/2446
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

An examining system for imaging an object positionable in an object plane, includes an illumination device for supplying energy to a delimited field of the object such that charged particles emerge from locations of the field, the field being displaceable in the plane of the object, a first deflector for providing a variable deflection field for guiding charged particles emerging from locations of a selectable region of the object through a fixed, predetermined beam cross-section, and a position-sensitive detector disposed in the beam path such that the charged particles, after having passed through the first deflector, impinge on the position-sensitive detector, wherein particles emerging from different locations of the region are imaged on different locations of the position-sensitive detector which are allocated to the locations of emergence.