Scrubber with sonic nozzle
US6904637B2 · kind B2 · utility
11Cited by
13References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 3, 2001 |
| Grant date | Jun 14, 2005 |
| Priority date | — |
| Expiry date | May 30, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus for cleaning a substrate is provided. The apparatus comprises a plurality of rollers adapted to support a substrate in a vertical orientation, a scrubber brush adapted to contact a substrate supported by the plurality of rollers, and a sonic nozzle positioned at an elevation below the elevation of the scrubber brush and adapted so as to output a sonicated fluid spray that contacts a beveled edge or a major surface of the substrate such that fluid having sufficient sonic energy to harm the scrubber brush will not contact the scrubber brush.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.