Patent · US Expired

Semiconductor structure having buried track conductors, and method for generating an electrical contact with buried track conductors

US6909153B2 · kind B2 · utility

4Cited by

4References

6Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Christoph Ludwig · Radeberg, DE
Klaus-Dieter Morhard · Dresden, DE
Christoph Kutter · Munich, DE

Key dates

Filing date	May 31, 2002
Grant date	Jun 21, 2005
Priority date	—
Expiry date	May 31, 2022

Classification

Technology area (CPC H)Electricity
CPC primaryH10B12/485
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A semiconductor structure 300 comprises a plurality of first track conductors 303, a plurality of second track conductors 304, which are insulated with respect to the first track conductors 303 and form a grid together with these first track conductors 303, and a plurality of third track conductors 307 parallel above the first track conductors 303, which third track conductors 307 partly cover the second track conductors 304 and are insulated with respect thereto, in which semiconductor structure 300, between in each case two adjacent second track conductors 304, there is located an electrical contact 305 between each first track conductor 303 and the corresponding third track conductor 307 which lies above it.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.