Probe station
US6914423B2 · kind B2 · utility
9Cited by
5References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 12, 2001 |
| Grant date | Jul 5, 2005 |
| Priority date | — |
| Expiry date | Jan 12, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/29
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A chuck assembly includes a rotational member and an auxiliary chuck. The rotational member is suitable for supporting a chuck thereon wherein the rotational member is rotatable with respect to the chuck assembly. The auxiliary chuck is free from rotating with respect to the chuck assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.