Substrate processing apparatus and method of aligning substrate carrier apparatus
US6915183B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 27, 2004 |
| Grant date | Jul 5, 2005 |
| Priority date | — |
| Expiry date | May 27, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention has a first optical detection mark having a predetermined positional coordinate in a lateral direction with respect to a carrier opening of a processing unit through which a carrier apparatus enters and exits, a second optical detection mark having a predetermined positional coordinate in a vertical direction with respect to the carrier opening, and an optical sensor provided on the substrate carrier apparatus for detecting the first or second optical detection mark. The substrate carrier apparatus is rotated by a predetermined angle from a position of the substrate carrier apparatus where the optical sensor detects the first optical detection mark, and the substrate carrier apparatus is moved in the vertical direction by a predetermined amount of movement from a position of the substrate carrier apparatus where the optical sensor detects the second optical detection mark. After the substrate carrier apparatus faces the carrier opening of the processing unit, the substrate carrier apparatus is allowed to enter the processing unit to acquire in advance a precise transfer position when transferring a substrate to a predetermined position on a mounting table in t…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.