Naruaki Iida
46Patents
15h-index
79Co-inventors
84Inventor score
Filing activity: Feb 5, 1993 → Apr 4, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5826129A | Substrate processing system | Electricity | 472 | Expired |
| USD695240S1 | Arm for wafer transportation for manufacturing semiconductor | General | 467 | Active |
| US8528889B2 | Device and method for supporting a substrate | Emerging Cross-Sectional Technologies | 134 | Active |
| US5565034A | Apparatus for processing substrates having a film formed on a surface of the substrate | Emerging Cross-Sectional Technologies | 133 | Expired |
| US5664254A | Substrate processing apparatus and substrate processing method | Electricity | 92 | Expired |
| US5460478A | Method for processing wafer-shaped substrates | Emerging Cross-Sectional Technologies | 78 | Expired |
| US5364222A | Apparatus for processing wafer-shaped substrates | Emerging Cross-Sectional Technologies | 75 | Expired |
| US5725664A | Semiconductor wafer processing apparatus including localized humidification between coating and heat treatment sections | Emerging Cross-Sectional Technologies | 54 | Expired |
| US6054181A | Method of substrate processing to form a film on multiple target objects | Emerging Cross-Sectional Technologies | 50 | Expired |
| US6471422B2 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 38 | Expired |
| US5928390A | Vertical processing apparatus | Electricity | 33 | Expired |
| US6402401B1 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 27 | Expired |
| US6672779B2 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 24 | Expired |
| USD701498S1 | Arm for wafer transportation for manufacturing semiconductor | General | 23 | Active |
| USD674761S1 | Wafer holding member | General | 16 | Active |
| USRE37470E | Substrate processing apparatus and substrate processing method | General | 15 | Expired |
| US6915183B2 | Substrate processing apparatus and method of aligning substrate carrier apparatus | Emerging Cross-Sectional Technologies | 11 | Expired |
| US6206974A | Substrate processing system, interface apparatus, and substrate transportation method | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6332751A | Transfer device centering method and substrate processing apparatus | Performing Operations; Transporting | 8 | Expired |
| US6168669A | Substrate holding apparatus and substrate process system | Electricity | 7 | Expired |
| US6643564B2 | Method of determining retreat permission position of carrier arm and teaching device thereof | Emerging Cross-Sectional Technologies | 7 | Expired |
| US8292549B2 | Substrate carrying device, substrate carrying method and computer-readable storage medium | Performing Operations; Transporting | 5 | Active |
| US6050389A | Carrier apparatus with more than one carrier belts and processing apparatus therewith | Emerging Cross-Sectional Technologies | 5 | Expired |
| US7208066B2 | Substrate processing apparatus and substrate processing method | Electricity | 4 | Expired |
| US9818654B2 | Substrate processing apparatus and substrate processing method | Electricity | 4 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.