Method for fabricating a trench capacitor with an insulation collar

US6916721B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Lars Heineck · Dresden, DE
• Stephan Kudelka · Radeberg, DE
• Jorn Lutzen · Dresden, DE
• Hans-Peter Moll · Dresden, DE
• Martin Popp · Dresden, DE
• Till Schlosser · Dresden, DE
• Johann Steinmetz · Königsbrunn, DE

Key dates

• Filing date: Nov 26, 2003
• Grant date: Jul 12, 2005
• Expiry date: Nov 26, 2023

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D1/665

Abstract

A method for fabricating a trench capacitor with an insulation collar in a substrate, which is electrically connected to the substrate on one side via a buried contact, using a hard mask with a corresponding mask opening.