Disk coating system
US6919001B2 · kind B2 · utility
42Cited by
19References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 10, 2003 |
| Grant date | Jul 19, 2005 |
| Priority date | — |
| Expiry date | May 16, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67276
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
There is described a disk processing and manufacturing equipment in which the processing chambers are stacked on top of each other and in which the disks move through the system on disk carriers which are adjustable to take disks of varying sizes. The disks enter the system through a load zone and are then installed into disk carriers. They move in the carriers sequentially through processing chambers at one level and then move to the other level in a lift or elevator. At this other level, the disks again move sequentially through the system on that level and then exit at an unload zone.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.