Terry Bluck
52Patents
12h-index
53Co-inventors
87Inventor score
Filing activity: Aug 7, 1998 → Jan 31, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6919001B2 | Disk coating system | Electricity | 42 | Expired |
| US6368678B1 | Plasma processing system and method | Electricity | 32 | Expired |
| US8419341B2 | Linear vacuum robot with Z motion and articulated arm | Emerging Cross-Sectional Technologies | 31 | Active |
| US6517691B1 | Substrate processing system | Emerging Cross-Sectional Technologies | 22 | Expired |
| US7901539B2 | Apparatus and methods for transporting and processing substrates | Electricity | 21 | Active |
| US8293066B2 | Apparatus and methods for transporting and processing substrates | Electricity | 17 | Active |
| US6203862A | Processing systems with dual ion sources | Electricity | 16 | Expired |
| US9914994B2 | System architecture for combined static and pass-by processing | Electricity | 14 | Active |
| US6101972A | Plasma processing system and method | Electricity | 14 | Expired |
| US6228429A | Methods and apparatus for processing insulating substrates | Physics | 13 | Expired |
| US8349196B2 | System and method for commercial fabrication of patterned media | Electricity | 13 | Active |
| US8303764B2 | Apparatus and methods for transporting and processing substrates | Electricity | 12 | Active |
| US10204810B2 | Linear vacuum robot with Z motion and articulated arm | Emerging Cross-Sectional Technologies | 10 | Active |
| US7611322B2 | Processing thin wafers | Emerging Cross-Sectional Technologies | 9 | Active |
| US8363378B2 | Method for optimized removal of wafer from electrostatic chuck | Electricity | 8 | Active |
| US9892890B2 | Narrow source for physical vapor deposition processing | Electricity | 7 | Active |
| US8784622B2 | System and method for dual-sided sputter etch of substrates | Electricity | 7 | Active |
| US9165587B2 | System and method for dual-sided sputter etch of substrates | Electricity | 6 | Active |
| US9324598B2 | Substrate processing system and method | Emerging Cross-Sectional Technologies | 6 | Active |
| US9525099B2 | Dual-mask arrangement for solar cell fabrication | Emerging Cross-Sectional Technologies | 5 | Active |
| US9691649B2 | Linear vacuum robot with z motion and articulated arm | Emerging Cross-Sectional Technologies | 4 | Active |
| US9543114B2 | Implant masking and alignment system with rollers | Electricity | 3 | Active |
| US9524896B2 | Apparatus and methods for transporting and processing substrates | Electricity | 3 | Active |
| US8795466B2 | System and method for processing substrates with detachable mask | Electricity | 3 | Active |
| US8677929B2 | Method and apparatus for masking solar cell substrates for deposition | Emerging Cross-Sectional Technologies | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.