Coordinate measuring stage
US6919658B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 1, 2003 |
| Grant date | Jul 19, 2005 |
| Priority date | — |
| Expiry date | Jan 11, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/1503
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An XY coordinate measuring stage includes a drive unit for a coordinate axis. The drive unit has a friction rod and a motor, the motor including a motor shaft in contact with a side of the friction rod. An applied pressure roller contacts an opposite side of the friction rod. At least one applied pressure spring urges the applied pressure roller, the friction rod, and the motor shaft against one another with an applied pressure force so that the motor shaft frictionally engages the friction rod, converting a rotational motion of the motor into a linear motion of the friction rod. A compensation device associated with the motor shaft generates a compensation force onto the motor shaft oppositely to the applied pressure force so as to at least partially compensate for the applied pressure force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.