RF generating system with fast loop control
US6920312B1 · kind B1 · utility
60Cited by
34References
51Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 2, 2002 |
| Grant date | Jul 19, 2005 |
| Priority date | — |
| Expiry date | Jun 14, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32082
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An RF generating system operates with high efficiency to supply RF output power to a plasma load. The RF generating system is capable of modulating the RF output power at frequencies up to the frequency of the RF output power while maintaining high efficiency operation. Broadband frequency modulation of the RF output power suppresses instabilities thereby minimizing unstable behavior of the plasma load.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.