Device used for detecting clamping force of processed object and method thereof
US6920796B2 · kind B2 · utility
0Cited by
6References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 13, 2003 |
| Grant date | Jul 26, 2005 |
| Priority date | — |
| Expiry date | Dec 30, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A device used for detecting the clamping force of a processed object and a method thereof are proposed. The device comprises a detection unit, a basis component and a pressure detection component disposed on the basis component. The basis component having the pressure detection component is closely placed between pivotal rods so that the detection unit can detect variation of electric properties of the pressure detection component to adjust the spacing between the pivotal rods, hence facilitating adjustment of the clamping force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.