Revolution member supporting apparatus and semiconductor substrate processing apparatus
US6921466B2 · kind B2 · utility
27Cited by
14References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 27, 2001 |
| Grant date | Jul 26, 2005 |
| Priority date | — |
| Expiry date | Dec 31, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A revolution member supporting apparatus holds and rotates a disc-shaped object (object to be rotated) such as a semiconductor wafer. The revolution member supporting apparatus includes a rotatable member which rotates about an axis of roation, and a plurality of holding members which are disposed along a circle having a center corresponding to the axis of rotation of the rotatable member, and which revolve around the axis of rotation when the rotatable member rotates, wherein the holding members are allowed to swing about their own central axes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.