Inspection condition setting program, inspection device and inspection system
US6928375B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 10, 2003 |
| Grant date | Aug 9, 2005 |
| Priority date | — |
| Expiry date | Apr 10, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A program is provided for setting efficiently, and with precision, the inspection conditions of an inspection device that detects particles and deformed patterns in or on products such as semiconductor integrated circuits that are manufactured by simultaneously forming a plurality of products on a single substrate. In particular, the system achieves greater efficiency of the setting of cell comparison regions and the setting of non-inspection regions. Input processing of a product type code, input processing of chip size and configuration information, reading processing of circuit layout data, extraction processing of repeated pattern region coordinates, extraction processing of sparse region coordinates and circuit pattern condition registration processing are sequentially executed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.