Microstructure with movable mass
US6931928B2 · kind B2 · utility
8Cited by
4References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 2, 2002 |
| Grant date | Aug 23, 2005 |
| Priority date | — |
| Expiry date | Sep 2, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0842
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microstructure includes a mass; a base member in which the mass is movably contained. The mass includes a surface, which is exposed out of the base member, and a stopper wire, which is arranged above the surface of the mass so as to inhibit over move of the mass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.