Methods and apparatus for determining optical constants of semiconductors and dielectrics with interband states
US6934031B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 27, 2001 |
| Grant date | Aug 23, 2005 |
| Priority date | — |
| Expiry date | Jul 5, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/47
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for calculating the refractive index and the extinction coefficient for materials relates the physical parameters being calculated to the scattering caused by interband states in the material using a model which includes a quantum mechanical transition equation for transitions between valence and/or conduction bands and interband states of the material. The method can be used for material engineering, process control for processes affecting the interband states in the material, and in estimation of the amount of interband states which have been introduced into a material as a result of such a process. Apparatus for implementing the method are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.