Measurement configuration including a vehicle and method for performing measurements with the measurement configuration at various locations

US6935201B2 · kind B2 · utility

Assignees

• Infineon Technologies AG · DE
• Nanophotonics Co., Ltd. · DE

Inventors

• Michael Abraham · Mainz, DE
• Eckhard Marx · Radebeul, DE

Key dates

• Filing date: Aug 11, 2003
• Grant date: Aug 30, 2005
• Expiry date: Aug 11, 2023

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67772
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A measurement device, i.e. a metrology tool, and a vehicle are combined to provide a mobile metrology in a fabrication facility. Peripheral equipment such as a device transfer unit, for, e.g., FOUPs in semiconductor manufacturing, an electronic control system with, e.g., a PC, monitor, and keyboard and optionally a vacuum pump is also provided in module frames of the vehicle. The measurement configuration particularly reduces bottleneck situations in equipment qualifying of processing tools during fast ramp-up phases of, e.g., semiconductor manufacturing facilities, thereby saving costs. The construction is based on PGVs or AGVs and allows a fast operation directly at the location of a processing tool. With the possible exception of power supply or operator control, the measurement configuration can operate fully autonomously.