Single proof mass, 3 axis MEMS transducer
US6936492B2 · kind B2 · utility
28Cited by
9References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 10, 2004 |
| Grant date | Aug 30, 2005 |
| Priority date | — |
| Expiry date | Dec 10, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0831
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A transducer is provided herein which comprises an unbalanced proof mass (51), and which is adapted to sense acceleration in at least two mutually orthogonal directions. The proof mass (51) has first (65) and second (67) opposing sides that are of unequal mass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.