Lithographic apparatus, device manufacturing method and device manufactured thereby
US6937316B2 · kind B2 · utility
2Cited by
8References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 13, 2002 |
| Grant date | Aug 30, 2005 |
| Priority date | — |
| Expiry date | Oct 27, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/709
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A bellows used to connect two sealed compartments of the lithographic apparatus or a compartment and a pump, comprises a first section having smooth helical corrugations and a second section that can accommodate the longitudinal movement caused by relative rotation of the ends of the first section. The second section may be a mirror image of the first section or one or more sub-sections of circumferential corrugations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.