Laser scanner with amplitude and phase detection
US6937343B2 · kind B2 · utility
3Cited by
2References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 29, 2002 |
| Grant date | Aug 30, 2005 |
| Priority date | — |
| Expiry date | May 22, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for optical evaluation of a sample includes scanning a beam of coherent radiation over the sample, whereby the radiation is scattered from the sample, while directing a portion of the scanning beam toward a diffraction grating so that the portion of the beam is scanned over the grating, whereby a frequency-shifted reference beam is diffracted from the grating. The scattered radiation and the frequency-shifted reference beam are combined at a detector to generate an optical heterodyne signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.