Inventor · Yafia, IL

Haim Feldman

44Patents
7h-index
44Co-inventors
69Inventor score

Filing activity: Dec 24, 1998 → Sep 2, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US6124924A Focus error correction method and apparatus Physics 50 Expired
US7630069B2 Illumination system for optical inspection Electricity 18 Active
US7339661B2 Dark field inspection system Electricity 16 Expired
US6809808B2 Wafer defect detection system with traveling lens multi-beam scanner Physics 13 Expired
US7030978B2 System and method for inspection of a substrate that has a refractive index Physics 10 Expired
US7053395B2 Wafer defect detection system with traveling lens multi-beam scanner Physics 8 Expired
US7331033B2 Simulation of aerial images Physics 7 Expired
US7187439B2 High throughput inspection system and method for generating transmitted and/or reflected images Physics 7 Expired
US7002695B2 Dual-spot phase-sensitive detection Electricity 7 Expired
US6853475B2 Wafer defect detection system with traveling lens multi-beam scanner Physics 6 Expired
US7684048B2 Scanning microscopy Physics 6 Active
US10386311B1 System and method for defect detection using multi-spot scanning Physics 6 Active
US6943898B2 Apparatus and method for dual spot inspection of repetitive patterns Physics 6 Expired
US9810643B1 System and method for defect detection using multi-spot scanning Physics 5 Active
US9535014B1 Systems and methods for inspecting an object Physics 4 Active
US6930770B2 High throughput inspection system and method for generating transmitted and/or reflected images Physics 4 Expired
US6937343B2 Laser scanner with amplitude and phase detection Physics 3 Expired
US7924419B2 Illumination system for optical inspection Electricity 3 Active
US6671098B2 Scanning angle expander and a method for expanding a scanning beam angle Physics 2 Expired
US7973919B2 High resolution wafer inspection system Physics 2 Active
US8228601B2 Scanning microscopy using inhomogeneous polarization Physics 2 Active
US8488117B2 Inspection system and method for fast changes of focus Physics 2 Active
US6750436B2 Focus error detection apparatus and method having dual focus error detection path Physics 2 Expired
US7053985B2 Printer and a method for recording a multi-level image Physics 1 Expired
US7342218B2 Methods and systems for optical inspection of surfaces based on laser screening Physics 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.