Slurry delivery arm
US6939210B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 2, 2003 |
| Grant date | Sep 6, 2005 |
| Priority date | — |
| Expiry date | Jun 1, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B57/02
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A polishing fluid delivery apparatus has been provided that in one embodiment includes a support member, a dispense arm, a polishing fluid delivery tube and a variable restricting device. The dispense arm extends from an upper portion of the support member and has an outlet of the delivery tube coupled thereto. The restricting device interfaces with the delivery tube and is adapted to provide a variable restriction to flow passing through the delivery tube. In another embodiment, the restricting device is a pinch valve and the tube in continuous from the outlet to beyond a portion that interfaces with the pinch valve. In yet another embodiment, the position of the delivery arm is controllable.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.