Two axis state for microscope
US6943945B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 16, 2004 |
| Grant date | Sep 13, 2005 |
| Priority date | — |
| Expiry date | Apr 16, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/26
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A two axis stage for microscopes that is thin, has reduced vibration, and is adapted for increased stage transportation speeds is capable of being disposed inside a chamber without changing a floor-projected area. The XY stage comprises a base 1, an X table 2 that can be moved in an X direction on the base 1 by an X feed screw 7, and a Y table 3 that is supported on the X table 2 and movable in a Y direction. A third table 4 is disposed on the base 1, the third table being movable in the Y direction by a Y-feed screw 8 positioned on the base 1. Additionally, a slide unit 14 is disposed on the third table 4, the slide unit 14 being movable in the X direction and connected with the Y table 3.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.