Eiichi Seya
12Patents
8h-index
36Co-inventors
72Inventor score
Filing activity: Jan 15, 1991 → Jan 20, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6664552B2 | Method and apparatus for specimen fabrication | Electricity | 73 | Expired |
| US5562800A | Wafer transport method | Emerging Cross-Sectional Technologies | 50 | Expired |
| US5420436A | Methods for measuring optical system, and method and apparatus for exposure using said measuring method | Physics | 26 | Expired |
| US5235591A | Stack type optical disc apparatus, sealed and separate type optical head therefor and optical disc medium | Physics | 21 | Expired |
| US5601686A | Wafer transport method | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6794663B2 | Method and apparatus for specimen fabrication | Electricity | 16 | Expired |
| US7268356B2 | Method and apparatus for specimen fabrication | Electricity | 16 | Expired |
| US7897936B2 | Method and apparatus for specimen fabrication | Electricity | 8 | Active |
| US7791043B2 | Stage mechanism, electron microscope having the stage mechanism and method of controlling positioning of stage mechanism | Electricity | 8 | Active |
| US6943945B2 | Two axis state for microscope | Physics | 2 | Expired |
| US8796651B2 | Method and apparatus for specimen fabrication | Electricity | 2 | Active |
| US7514683B2 | Scanning electron microscope | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.