Torsional resonance mode probe-based instrument and method
US6945099B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 2, 2002 |
| Grant date | Sep 20, 2005 |
| Priority date | — |
| Expiry date | Jul 2, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method of operating a probe-based instrument in a torsional mode. The method includes providing a probe having a cantilever defining a longitudinal axis and supporting a tip. In operation, the method torsionally oscillates the probe generally about the longitudinal axis at a resonance. In addition, the method changes a separation distance between the tip and a surface of a sample so the tip interacts with the surface during data acquisition. By detecting a change in the torsional oscillation of the cantilever in response to the interaction between the tip and the surface, forces, including shear forces and shear force gradients, between the tip and the surface can be measured to determine sub-nanometer features.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.