Patent · US Expired

Vibration isolator with low lateral stiffness

US6953109B2 · kind B2 · utility

8Cited by

17References

87Claims

0Family size

Assignee

NIKON CORPORATION · JP

Inventors

Douglas C. Watson · Campbell, US
Alton H. Phillips · East Palo Alto, US

Key dates

Filing date	Oct 8, 2002
Grant date	Oct 11, 2005
Priority date	—
Expiry date	Oct 8, 2022

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF16F9/02
WIPO fieldMechanical elements
WIPO sectorMechanical engineering

Abstract

A vibration isolator (200) for isolating a first assembly (202) from vibration from a second assembly (204) includes a housing (206) that is secured to the second assembly (204) and a pendulum assembly (208). The pendulum assembly (208) includes one or more pistons (226) and a connector assembly (224). The piston (226) is coupled to the first assembly (202). The connector assembly (224) couples the piston (226) to the housing (206) and allows the piston (226) to swing laterally relative to the housing (206). The vibration isolator (200) can also include a pendulum support (264) and/or a mover (580) that moves the piston (226) and assists in supporting the load of the first assembly (202).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.