Alton H. Phillips
44Patents
9h-index
22Co-inventors
75Inventor score
Filing activity: Dec 29, 1998 → Oct 8, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6600547B2 | Sliding seal | Physics | 469 | Expired |
| US6922293B2 | Kinematic optical mounting assembly with flexures | Physics | 19 | Expired |
| US6533531B1 | Device for handling wafers in microelectronic manufacturing | Emerging Cross-Sectional Technologies | 18 | Expired |
| US7095482B2 | Multiple system vibration isolator | Mechanical Engineering; Lighting; Heating | 13 | Expired |
| US7477358B2 | EUV reticle handling system and method | Physics | 13 | Expired |
| US6880942B2 | Adaptive optic with discrete actuators for continuous deformation of a deformable mirror system | Physics | 12 | Expired |
| US6989922B2 | Deformable mirror actuation system | Physics | 12 | Expired |
| US6774981B1 | Modular exposure apparatus with removable optical device and improved isolation of the optical device | Physics | 11 | Expired |
| US6614508B2 | Reversed, double-helical bellows seal | Physics | 10 | Expired |
| US6953109B2 | Vibration isolator with low lateral stiffness | Mechanical Engineering; Lighting; Heating | 8 | Expired |
| US6021783A | Braid removal tool | Human Necessities | 6 | Expired |
| US6987559B2 | Vibration-attenuation devices having low lateral stiffness, and exposure apparatus comprising same | Physics | 6 | Expired |
| US8284379B2 | Devices and methods for reducing residual reticle chucking forces | Physics | 6 | Active |
| US7804583B2 | EUV reticle handling system and method | Physics | 5 | Active |
| US7551265B2 | Contact material and system for ultra-clean applications | Emerging Cross-Sectional Technologies | 4 | Active |
| US7728462B2 | Monolithic stage devices providing motion in six degrees of freedom | Electricity | 4 | Active |
| US7591561B2 | Liquid cooled mirror for use in extreme ultraviolet lithography | Physics | 4 | Active |
| US7375797B2 | Utilities transfer system in a lithography system | Physics | 2 | Active |
| US10335169B2 | Angled orthopaedic driver | Human Necessities | 2 | Active |
| US8425060B2 | Self-correcting optical elements for high-thermal-load optical systems | Physics | 2 | Active |
| US6666611B2 | Three degree of freedom joint | Emerging Cross-Sectional Technologies | 1 | Expired |
| US10121760B2 | Wafer bonding system and method | Electricity | 1 | Active |
| US8794011B2 | Method and apparatus for utilizing in-situ measurements techniques in conjunction with thermoelectric chips (TECs) | Physics | 1 | Active |
| US8847721B2 | Thermally conductive coil and methods and systems | Electricity | 1 | Active |
| US7773198B2 | Filtered device container assembly with shield for a reticle | Physics | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.