Apparatus and method for improving microwave coupling to a resonant cavity
US6954077B2 · kind B2 · utility
11Cited by
8References
38Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 31, 2003 |
| Grant date | Oct 11, 2005 |
| Priority date | — |
| Expiry date | Feb 4, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3299
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An equipment status monitoring system (10) and method of operating includes first (40) and second (50) microwave mirrors in a plasma processing chamber (20) each forming a multi-modal resonator. A power source (60) is coupled to the first mirror (40) and configured to produce an excitation signal. A detector (70) is coupled to at least one of the first mirror (40) and the second mirror (50) and configured to measure an excitation signal. At least one of the power source (60) and the detector (70) is coupled to a divergent aperture (44).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.