System for vibration control
US6959484B1 · kind B1 · utility
5Cited by
64References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 27, 2000 |
| Grant date | Nov 1, 2005 |
| Priority date | — |
| Expiry date | Jan 27, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53196
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electro-active material bonded to an electroded sheet.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.