Chuck for holding a device under test
US6965226B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 7, 2001 |
| Grant date | Nov 15, 2005 |
| Priority date | — |
| Expiry date | Jul 5, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/35
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A chuck for a probe station that include a first chuck assembly element defining a substantially planar upper and lower surfaces, and another chuck assembly element defining a substantially planar surface. The chuck includes a spacing mechanism having exactly three independent supports interconnecting the first chuck assembly element and the another chuck assembly element defining the spacing between the first chuck assembly element and the another chuck assembly element in such a manner that the substantially planar lower surface of the first chuck assembly element and the substantially planar upper surface of the another chuck assembly element are in opposing relationship with respect to one another.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.