System and method for dechucking a workpiece from an electrostatic chuck
US6965506B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 18, 2002 |
| Grant date | Nov 15, 2005 |
| Priority date | — |
| Expiry date | Feb 5, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N13/00
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention comprises a system and method for determining the reverse voltage and time to apply to the dechucking of a workpiece from an electrostatic chuck (ESC). The system for dechucking comprises a processing chamber operatively coupled to a microprocessor and a memory that is configured to determine the dechucking parameters for the workpiece. The method for determining dechucking parameters comprises generating a correlation between ESC resistance and dechucking parameters, performing a single experimental test on a new ESC and generating a fitting parameter, and using the correlation and the fitting parameter to determine the dechucking parameters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.