Patent · US Expired

Fiber optic wafer probe

US6970634B2 · kind B2 · utility

1Cited by
17References
73Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 4, 2001
Grant dateNov 29, 2005
Priority date—
Expiry dateMay 4, 2021

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B6/3858
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A fiber optic wafer probe that includes a fiber optic cable for approaching a device under test.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.