Illumination device; and coordinate measuring instrument having an illumination device

US6975409B2 · kind B2 · utility

Assignee

• Leica Microsystems Semiconductor GmbH · DE

Inventors

• Franz Cemic · Hachenburg, DE
• Lambert Danner · Wetzlar, DE
• Gerhard Hoppen · Wetzlar, DE

Key dates

• Filing date: Jun 29, 2001
• Grant date: Dec 13, 2005
• Expiry date: Sep 26, 2021

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B6/0001
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An illumination device according to the present invention comprises a light source (1), an optical fiber bundle (4), a coupling-in optical system (3) before and a coupling-out optical system (5) after the fiber bundle (4), and an illuminating optical system (17; 20). A homogenizing optical system (6) between the coupling-out optical system (5) and illuminating optical system (17; 20) brings about a homogenization of the intensity distribution in the image field. The homogenizing optical system (6) advantageously comprises a micro-honeycomb condenser (7) and a lens member (8) which superimpose the exit opening of the fiber bundle (4) in an intermediate image plane (10) to form a homogeneous intermediate image. The coordinate measuring instrument comprises an X-Y measurement stage (26) for receiving a substrate with a feature (31) that is to be measured, an illumination system with a light source (1), an optical fiber bundle (4), a coupling-in optical system (3), a coupling-out optical system (5), an illuminating optical system (17; 20) for illuminating an image field on the substrate, and a detector device (14) for determining the position of the feature. A homogenizing optical syst…