Electro-osmotic pumps and micro-channels
US6981849B2 · kind B2 · utility
12Cited by
8References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 18, 2002 |
| Grant date | Jan 3, 2006 |
| Priority date | — |
| Expiry date | Apr 30, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The present disclosure relates generally to microelectronic technology, and more specifically, to an apparatus used for the cooling of active electronic devices utilizing electro-osmotic pumps and micro-channels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.