Spectrophotometer, ellipsometer, polarimeter and the like systems

US6982792B1 · kind B1 · utility

Assignee

• J.A. WOOLLAM CO., INC. · US

Inventors

• John A. Woollam · Lincoln, US
• Steven E. Green · Lincoln, US
• Ping He · Lincoln, US
• Blaine D. Johs · Lincoln, US
• Craig M. Herzinger · Lincoln, US
• Galen L. Pfeiffer · Lincoln, US
• Brian D. Guenther · Lincoln, US
• Martin M. Liphardt · Lincoln, US

Key dates

• Filing date: Feb 28, 2003
• Grant date: Jan 3, 2006
• Expiry date: Mar 24, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/213
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.