Patent · US Expired

Integrated circuit device having reduced substrate size and a method for manufacturing the same

US6989600B2 · kind B2 · utility

25Cited by
8References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 30, 2001
Grant dateJan 24, 2006
Priority date
Expiry dateSep 24, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/30107
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

CMOS logic LSI comprises, as a part thereof, n-channel MISFET's (Qn), p-channel MISFET's (Qp) and a first-layer wiring (11) to a third-layer (13) formed on a main surface of a silicon substrate (1), and as another part, a fourth-layer wiring (14) to a seventh-layer wiring (17) formed on a main surface of a glass substrate (30) different from the silicon substrate (1). The main surface of the silicon substrate (1) and the main surface of the glass substrate (30) are arranged in face-to-face relation with each other, and a plurality of microbumps (20A) formed at the uppermost portion of the silicon substrate (1) and a plurality of microbumps (20B) formed at the uppermost portion of the glass substrate (30) are electrically connected, thereby constituting the CMOS logic LSI as a whole.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.