Mass-production transfer support system and semiconductor manufacturing system
US6990388B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 27, 2004 |
| Grant date | Jan 24, 2006 |
| Priority date | — |
| Expiry date | Dec 27, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/30
- WIPO fieldIT methods for management
- WIPO sectorElectrical engineering
Abstract
A mass-production transfer support system has a mass-production transfer source managing computer for managing information generated in a trial-production process of a semiconductor device and a mass-production transfer destination managing computer for managing a mass-production process of the semiconductor device. The mass-production transfer source managing computer comprises: quality/recipe information input accepting means; quality/recipe information sending means; apparatus-difference correction information input accepting means for accepting an input of apparatus-difference correction information for correcting a difference in the quality of the semiconductor device associated with an apparatus-difference between semiconductor manufacturing apparatuses; apparatus-difference correction information storing means; and apparatus-difference correction information providing means for storing the apparatus-difference correction information in a database accessible by the mass-production transfer destination managing computer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.