Scanning electron beam apparatus and methods of processing data from same
US6995369B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 24, 2004 |
| Grant date | Feb 7, 2006 |
| Priority date | — |
| Expiry date | Jun 24, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/10061
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
One embodiment disclosed relates to a scanning electron beam apparatus. The apparatus includes an electron beam column, a scanning system, and a detection system. Circuitry in the apparatus is configured to store detected pixel data from each scan into one of the multiple frame buffers. A multi-frame data processor is configured to analyze the pixel data available in the multiple frame buffers. Another embodiment disclosed relates to a scanning electron beam apparatus having a data processor is configured to process the image data with a filter function having a filter strength, store results of the processing, and repeat the processing and the storing using various filter strengths. The results of the processing may comprise a critical dimension measurement at each filter strength.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.