Matthew Lent
11Patents
4h-index
24Co-inventors
60Inventor score
Filing activity: Sep 25, 2001 → Dec 22, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7838833B1 | Apparatus and method for e-beam dark imaging with perspective control | Electricity | 24 | Active |
| US6722026B1 | Apparatus and method for removably adhering a semiconductor substrate to a substrate support | Emerging Cross-Sectional Technologies | 17 | Expired |
| US7879730B2 | Etch selectivity enhancement in electron beam activated chemical etch | Electricity | 8 | Active |
| US9696435B2 | Hybrid energy conversion and processing detector | Electricity | 5 | Active |
| US7709792B2 | Three-dimensional imaging using electron beam activated chemical etch | Electricity | 4 | Active |
| US9966220B2 | Electron energy loss spectrometer using direct detection sensor | Electricity | 3 | Active |
| US6995369B1 | Scanning electron beam apparatus and methods of processing data from same | Physics | 2 | Expired |
| US10215865B2 | Hybrid energy conversion and processing detector | Electricity | 1 | Active |
| US8052885B2 | Structural modification using electron beam activated chemical etch | Electricity | 1 | Active |
| US12057515B2 | Electronic imaging detector with thermal conduction layer | Electricity | 0 | Active |
| US10535492B2 | Electron energy loss spectrometer using direct detection sensor | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.