Semiconductor processing apparatus having lift and tilt mechanism
US7002698B2 · kind B2 · utility
41Cited by
63References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 24, 2003 |
| Grant date | Feb 21, 2006 |
| Priority date | — |
| Expiry date | Dec 26, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67781
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A lift/tilt assembly for use in a semiconductor wafer processing device is set forth. The lift/tilt assembly includes a linear way comprising a fixed frame and a moveable frame. A nest for accepting a plurality of semiconductor wafers is rotatably connected to the moveable frame. The nest rotates between a wafer-horizontal orientation and a wafer-vertical orientation as it is driven with the movable frame by a motor that is coupled to the linear way. A lever connected to the nest provides an offset from true vertical for the nest when the nest is in the wafer-vertical orientation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.