Patent · US Expired

Multi-process system

US7005010B2 · kind B2 · utility

2Cited by

22References

20Claims

0Family size

Assignee

Semitool, Inc. · US

Inventors

Eric J. Bergman · Kalispell, US
Dana Scranton · Kalispell, US
Erik Lund · Bellevue, US
Worm Lund · Bellevue, US

Key dates

Filing date	Sep 4, 2003
Grant date	Feb 28, 2006
Priority date	—
Expiry date	Sep 4, 2023

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S134/902
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

A system for processing a workpiece includes an inner chamber pivotably supported within an outer chamber. The inner chamber has an opening to allow liquid to drain out. A motor pivots the inner chamber to bring the opening at or below the level of liquid in the inner chamber. As the inner chamber turns, liquid drains out. Workpieces within the inner chamber are supported on a holder or a rotor, which may be fixed or rotating. Multi processes may be performed within the inner chamber, reducing the need to move the workpieces between various apparatus and reducing risk of contamination.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.